KW

Katsuhiko Wakana

GI Gigaphoton: 3 patents #3 of 52Top 6%
Overall (2021): #75,335 of 548,734Top 15%
3
Patents 2021

Issued Patents 2021

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
11036150 Extreme ultraviolet light generation apparatus and maintenance method — 2021-06-15
11007778 Droplet discharge apparatus and calculation method — 2021-05-18
10925143 Laser apparatus and EUV light generating system — 2021-02-16