Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920318 | Shower plate, semiconductor manufacturing apparatus, and method for manufacturing shower plate | Yuuji KAWASE, Hiromasa MATSUFUJI, Kouji Teramoto | 2021-02-16 |
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Yukio Noguchi
Overall (2021): #193,534 of 548,734Top 40%
1
Patents 2021