Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10889890 | Vacuum processing apparatus and method for vacuum processing substrates | Silvia Schwyn-Thony, Michael Cheseaux, Marco Padrun | 2021-01-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10889890 | Vacuum processing apparatus and method for vacuum processing substrates | Silvia Schwyn-Thony, Michael Cheseaux, Marco Padrun | 2021-01-12 |