Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11007621 | Polishing apparatus and polishing method | Hiroshi Sotozaki | 2021-05-18 |
| 10987776 | Calibration method and non-transitory computer-readable storage medium storing a program of calibration | Pohan Chen, Kenichi Suzuki, Hiroshi Sotozaki | 2021-04-27 |