Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985037 | Substrate cleaning apparatus, substrate cleaning method, and control method of substrate cleaning apparatus | Daisuke Minoshima | 2021-04-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985037 | Substrate cleaning apparatus, substrate cleaning method, and control method of substrate cleaning apparatus | Daisuke Minoshima | 2021-04-20 |