HY

Hiroaki Yanagi

EB Ebara: 1 patents #62 of 147Top 45%
Overall (2021): #431,838 of 548,734Top 80%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
10903101 Substrate processing apparatus and method for detecting abnormality of substrate Mitsunori Komatsu, Toru Maruyama, Yoshinori Isono 2021-01-26