Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10894799 | Composition for depositing silicon-containing thin film including disilylamine compound and method for manufacturing silicon-containing thin film using the same | Sung-Gi Kim, Byeong-il YANG, Joong Jin PARK, Sang-Do Lee, Jeong Joo PARK +4 more | 2021-01-19 |