Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211296 | Comparing method and laser processing apparatus | Fumiya KAWANO, Tasuku Koyanagi | 2021-12-28 |
| 11114341 | Laser processing method | — | 2021-09-07 |
| 10985060 | Laser processing method using plasma light detection for forming a pore in a substrate | — | 2021-04-20 |
| 10923873 | Laser processing apparatus | — | 2021-02-16 |
| 10910511 | Manufacturing method of III-V compound crystal and manufacturing method of semiconductor device | Yusuke Mori, Masashi Yoshimura, Mamoru Imade, Masayuki Imanishi, Shin Tabata +1 more | 2021-02-02 |
| 10903087 | Laser processing method | — | 2021-01-26 |
| 10886159 | Method of processing wafer | Tasuku Koyanagi | 2021-01-05 |