Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177153 | Method of debonding work-carrier pair with thin devices | Xiaotian Zhou | 2021-11-16 |
| 10913254 | Method for debonding temporarily adhesive-bonded carrier-workpiece pair by using chemical and mechanical means | — | 2021-02-09 |