Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177353 | Silicon carbide semiconductor device, and manufacturing method of the same | Yuichi Takeuchi, Ryota Suzuki, Sachiko Aoi | 2021-11-16 |
| 11142842 | Film formation apparatus and film formation method | Fumiaki Kawai, Hiroyuki NISHINAKA, Masahiro Yoshimoto | 2021-10-12 |
| 11063145 | Silicon carbide semiconductor device and method for manufacturing same | Shuhei Mitani, Aiko Kaji, Yasuhiro Ebihara, Sachiko Aoi | 2021-07-13 |