Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031247 | Method and apparatus for depositing a monolayer on a three dimensional structure | — | 2021-06-08 |
| 10930846 | Methods of forming silicon-containing dielectric materials and methods of forming a semiconductor device comprising nitrogen radicals and oxygen-containing, silicon-containing, or carbon-containing precursors | Cole S. Franklin | 2021-02-23 |