Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075086 | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride | Mehmet Ozgur, Michael Syskind PEDERSEN | 2021-07-27 |
| 11049725 | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride | Mehmet Ozgur, Michael Syskind PEDERSEN | 2021-06-29 |
| 11035496 | Three-way microvalve device and method of fabrication | — | 2021-06-15 |
| 10910185 | Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices | Mehmet Ozgur, Paul Sunal, Lance Oh, Michael Syskind PEDERSEN | 2021-02-02 |