Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158486 | Method for SEM-guided AFM scan with dynamically varied scan speed | Yu Sun, Jun Chen, Ko Lun Chen | 2021-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158486 | Method for SEM-guided AFM scan with dynamically varied scan speed | Yu Sun, Jun Chen, Ko Lun Chen | 2021-10-26 |