Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164752 | Method of etching a dielectric layer | Frédéric Le Roux | 2021-11-02 |
| 11127835 | Method for etching a three-dimensional dielectric layer | Vincent Ah-Leung, Olivier Pollet | 2021-09-21 |
| 11121043 | Fabrication of transistors having stressed channels | Cyrille Le Royer, Yves Morand | 2021-09-14 |
| 11081399 | Method of producing microelectronic components | Cyrille Le Royer | 2021-08-03 |
| 11049724 | Method for producing patterns in a substrate | Lamia Nouri, Frederic Gaillard, Stefan Landis | 2021-06-29 |
| 10928725 | Method for the directed self-assembly of a block copolymer by graphoepitaxy | Raluca Tiron, Xavier Chevalier, Christophe Navarro | 2021-02-23 |
| 10923352 | Method for forming a functionalised guide pattern for a graphoepitaxy method | Raluca Tiron, Xavier Chevalier | 2021-02-16 |