Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158505 | Anti-reflective coating by ion implantation for lithography patterning | Cheng-Han Yang, Tsung-Han Wu, Chih-Wei Chang, Hsin-mei Lin, Hsi-Yen Chang | 2021-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158505 | Anti-reflective coating by ion implantation for lithography patterning | Cheng-Han Yang, Tsung-Han Wu, Chih-Wei Chang, Hsin-mei Lin, Hsi-Yen Chang | 2021-10-26 |