Ze Shen

HHHitachi High-Technologies: 1 patents #146 of 381Top 40%

Overall (2021): #190,387 of 548,734Top 35%

1 Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
11018014	Dry etching method	Tetsuo Ono, Hisao Yasunami	2021-05-25