Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127565 | Electron-beam lithography process adapted for a sample comprising at least one fragile nanostructure | Agnès Maitre, Pascale Senellart, Cherif Belacel | 2021-09-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127565 | Electron-beam lithography process adapted for a sample comprising at least one fragile nanostructure | Agnès Maitre, Pascale Senellart, Cherif Belacel | 2021-09-21 |