Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969699 | Projection lighting system for semiconductor lithography with an improved heat transfer | Ulrich Weber | 2021-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969699 | Projection lighting system for semiconductor lithography with an improved heat transfer | Ulrich Weber | 2021-04-06 |