Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199780 | Reflective optical element for EUV lithography and method for adapting a geometry of a component | — | 2021-12-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199780 | Reflective optical element for EUV lithography and method for adapting a geometry of a component | — | 2021-12-14 |