Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983443 | Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device | Lars Berger, Ralf Kiesel, Paul Wijlaars | 2021-04-20 |