Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11029606 | Optical element for the beam guidance of imaging light in projection lithography | Jens Prochnau, Dirk Schaffer | 2021-06-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11029606 | Optical element for the beam guidance of imaging light in projection lithography | Jens Prochnau, Dirk Schaffer | 2021-06-08 |