RF

Rolf Freimann

CG Carl Zeiss Smt Gmbh: 1 patents #34 of 161Top 25%
Overall (2021): #285,440 of 548,734Top 55%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10948833 Wafer holding device and projection microlithography system — 2021-03-16