Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192417 | Arrangement for connecting a chassis link to a wheel carrier | Julian Stratmann, Josef Holtheide, Felix Kallass, Thorsten Sander | 2021-12-07 |
| 11048173 | Method for restoring an illumination system for an EUV apparatus, and detector module | — | 2021-06-29 |