Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175595 | Method for localizing assembly errors | Thomas Niederhausen | 2021-11-16 |
| 11163239 | Method, measuring system and lithography apparatus | Frank Treubel | 2021-11-02 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175595 | Method for localizing assembly errors | Thomas Niederhausen | 2021-11-16 |
| 11163239 | Method, measuring system and lithography apparatus | Frank Treubel | 2021-11-02 |