Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079586 | Measuring microscope for measuring masks for lithographic methods and measuring method and calibration method therefor | Oliver Jäckel, Dirk Seidel | 2021-08-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079586 | Measuring microscope for measuring masks for lithographic methods and measuring method and calibration method therefor | Oliver Jäckel, Dirk Seidel | 2021-08-03 |