Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092702 | Particle beam system and method of operating a particle beam system | Jorg Fober, Judith Kimling, Wolfgang Berger, Stefan Meyer | 2021-08-17 |
| 10984983 | Particle beam system and method for operating a particle beam system | Marko Matijevic | 2021-04-20 |