YK

Youji Kawasaki

Canon: 2 patents #818 of 3,943Top 25%
Overall (2021): #95,893 of 548,734Top 20%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11187978 Planarization apparatus 2021-11-30
11163231 Planarization apparatus, planarization method, and article manufacturing method 2021-11-02