Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209515 | Method of determining correction function | Kazushi Kaneko | 2021-12-28 |
| 10971337 | Microwave output device and plasma processing apparatus | Kazushi Kaneko | 2021-04-06 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209515 | Method of determining correction function | Kazushi Kaneko | 2021-12-28 |
| 10971337 | Microwave output device and plasma processing apparatus | Kazushi Kaneko | 2021-04-06 |