Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11035034 | Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus | Yoshiaki DAIGO, Yoshitaka Ohtsuka, Hiroyuki Makita, Sotaro Ishibashi, Kazuto Yamanaka | 2021-06-15 |