Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11188001 | Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing article | Takashi Shibayama | 2021-11-30 |
| 11181363 | Measurement device, imprint apparatus, method for manufacturing product, light amount determination method, and light amount adjustment method | Kenji Yaegashi, Toshiki Iwai | 2021-11-23 |