Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194248 | Method of managing imprint apparatus, imprint apparatus, method of managing planarized layer forming apparatus, and method of manufacturing article | — | 2021-12-07 |
SA
Shintaro Aichi
Overall (2021): #266,047 of 548,734Top 50%
1
Patents 2021