Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061335 | Information processing apparatus, storage medium, lithography apparatus, lithography system, and article manufacturing method | Noburu Takakura, Takahiro Takiguchi | 2021-07-13 |
| 10996574 | Substrate processing apparatus, article manufacturing method, substrate processing method, substrate processing system, management apparatus, and storage medium | Takahiro Takiguchi | 2021-05-04 |