Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199773 | Imprint apparatus, imprint method, and article manufacturing method | Toshihiro Maeda | 2021-12-14 |
| 11073769 | Conveyance apparatus, conveyance method, lithography apparatus, lithography system, and article manufacturing method | — | 2021-07-27 |