Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199784 | Exposure apparatus and article manufacturing method | Atsushi Shigenobu, Yutoku Yoshioka | 2021-12-14 |
MS
Masatoshi Shimazaki
Overall (2021): #341,810 of 548,734Top 65%
1
Patents 2021