Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036149 | Imprint apparatus, method of operating the same, and method of manufacturing article | Yoichi Matsuoka, Kiyohito Yamamoto, Hisanobu Azuma, Shigeru Terashima, Toshihiro Maeda +2 more | 2021-06-15 |
| 10889052 | Imprint apparatus, method for manufacturing article, and exposure apparatus | Yoichi Matsuoka | 2021-01-12 |