Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10884236 | Optical device, projection optical system, exposure apparatus using the same, and method for manufacturing article | — | 2021-01-05 |
CS
Choshoku Sai
Overall (2021): #495,875 of 548,734Top 95%
1
Patents 2021