Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11085799 | Position detection apparatus that detects a position of an object by detecting light from a scale, and lithography apparatus, force sensor, and apparatus having force sensor including the position detection apparatus | — | 2021-08-10 |
| 10969284 | Optical sensor and apparatus including optical sensor | — | 2021-04-06 |