Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171024 | Reticle compartment and diffusor plate | — | 2021-11-09 |
| 11167322 | Cleaning systems and methods for semiconductor substrate storage articles | — | 2021-11-09 |
| 11152203 | Semiconductor cleaner systems and methods | — | 2021-10-19 |
| 11107715 | Semiconductor stocker systems and methods | — | 2021-08-31 |
| 11049750 | Container storage add-on for bare workpiece stocker | — | 2021-06-29 |
| 11024526 | Robot with gas flow sensor coupled to robot arm | — | 2021-06-01 |
| 10930536 | Workpiece stocker with circular configuration | — | 2021-02-23 |
| 10892155 | Semiconductor cleaner systems and methods | — | 2021-01-12 |