Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189465 | Adjustable capacitor, impedance matching device and semiconductor processing apparatus | Gang Wei | 2021-11-30 |
| 11056316 | Radio frequency pulse matching method and device thereof and pulsing plasma generation system | Gang Wei, Jing Wei, Jinzhi Bai, Jing Yang | 2021-07-06 |