Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957563 | Chamber wall heating for a millisecond anneal system | Manuel Mueller | 2021-03-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957563 | Chamber wall heating for a millisecond anneal system | Manuel Mueller | 2021-03-23 |