Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042091 | Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stability | JoonYeon Cho, M. Dalil Rahman | 2021-06-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042091 | Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stability | JoonYeon Cho, M. Dalil Rahman | 2021-06-22 |