Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061320 | Method for manufacturing a membrane assembly | Johan Hendrik Klootwijk | 2021-07-13 |
| 10928722 | Method of manufacturing a membrane assembly for EUV lithography, a membrane assembly, a lithographic apparatus, and a device manufacturing method | Paul Janssen, Johan Hendrik Klootwijk, Aleksandar Nikolov Zdravkov | 2021-02-23 |