Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086232 | Mark, overlay target, and methods of alignment and overlay | Beniamino Sciacca, Jia Wang | 2021-08-10 |
| 10948837 | Information determining apparatus and method | An Lin Gao, Andrey Nikipelov, Alexey Olegovich POLYAKOV, Brennan Peterson | 2021-03-16 |