Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156921 | Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure | Giovanni Luca Gattobigio, Theodorus Wilhelmus Polet | 2021-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156921 | Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure | Giovanni Luca Gattobigio, Theodorus Wilhelmus Polet | 2021-10-26 |