Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049689 | Systems and methods for charged particle beam modulation | Ehud Shaked | 2021-06-29 |
| 10884342 | Method and apparatus for predicting performance of a metrology system | Reinder Teun Plug, Kaustuve Bhattacharyya | 2021-01-05 |