Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11106144 | Lithographic method and apparatus | Paulus Hubertus Petrus Koller, Bartolomeus Petrus Rijpers | 2021-08-31 |
| 10996567 | Lithographic apparatus and method | Bart Smeets, Cristina Ioana Toma | 2021-05-04 |