Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126091 | Measurement apparatus and method for predicting aberrations in a projection system | Martijn Cornelis Schaafsma, Mhamed Akhssay | 2021-09-21 |
| 11036144 | Lithographic method and apparatus | Przemyslaw Aleksander Klosiewicz, Bogathi Vishnu Vardhana Reddy, Syed Umar Hassan Rizvi | 2021-06-15 |
| 11022895 | Lithographic apparatus adjustment method | Pierluigi FRISCO, Giovanni IMPONENTE | 2021-06-01 |
| 10948832 | Lithographic method and apparatus | Nick Kant, Robertus Martinus Alphonsus Van Herpen, Mark Louwrens Beks, Lense Hendrik-Jan Maria Swaenen, Nico Vanroose | 2021-03-16 |