Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969542 | Radiation source with temperature-controlled hollow fiber and a method for use in metrology applications | Patrick Sebastian Uebel | 2021-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969542 | Radiation source with temperature-controlled hollow fiber and a method for use in metrology applications | Patrick Sebastian Uebel | 2021-04-06 |