Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048175 | Apparatus for and method cleaning a support inside a lithography apparatus | Michael Andrew Chieda | 2021-06-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048175 | Apparatus for and method cleaning a support inside a lithography apparatus | Michael Andrew Chieda | 2021-06-29 |