Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D935572 | Gas channel plate | — | 2021-11-09 |
| 11149350 | Shower plate structure for supplying carrier and dry gas | Kazuo Sato | 2021-10-19 |
| 10950449 | Substrate processing apparatus | Kazuo Sato | 2021-03-16 |